磷化銦基板專用拋光液
InP Substrate Polishing Slurry
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IN-Q10 系列 INP 拋光液

INP Polishing Slurry

IN-Q10 為雙田拋光液配方組,內容物包含催化粉(Catalyst Granule)二氧化矽拋光液(Colloidal Silica Slurry)。依建議比例搭配去離子水調配後,可形成完整拋光液系統,適用於標準化 INP 拋光製程,並具有高移除率、低刮傷率特點。

IN-Q10 is a polishing slurry formulation set composed of Catalyst Granule and Colloidal Silica Slurry. After mixing with deionized water according to the recommended ratio, it forms a complete polishing slurry system suitable for standardized INP polishing processes, featuring high removal rate and low scratch rate.

產品特色
Product Features
  • 內容物包含催化粉與二氧化矽拋光液,依建議比例搭配去離子水即可完成調配。
    Composed of Catalyst Granule and Colloidal Silica Slurry; can be prepared by mixing with deionized water according to the recommended ratio.
  • 調配比例清楚,適合用於需要標準化調配流程的 INP 拋光製程。
    Clear mixing ratio, suitable for INP polishing processes that require standardized preparation procedures.
  • 具有高移除率、低刮傷率特點,可兼顧加工效率與表面品質。
    Features high removal rate and low scratch rate, helping balance processing efficiency and surface quality.
  • 提供大包裝與小包裝規格,可依製程需求選擇適合調配量。
    Available in both large and small package configurations for different process volume requirements.
產品物性 / 調配資訊
Product Properties / Mixing Information
項目
Item
IN-Q10
組成內容
Composition
催化粉(Catalyst Granule)/二氧化矽拋光液(Colloidal Silica Slurry)
Catalyst Granule / Colloidal Silica Slurry
包裝規格
Package
大包裝
催化粉 120 g;二氧化矽拋光液 20 L
Large Package
Catalyst Granule 120 g; Colloidal Silica Slurry 20 L
小包裝
催化粉 6 g;二氧化矽拋光液 1 L
Small Package
Catalyst Granule 6 g; Colloidal Silica Slurry 1 L
使用比例
Mixing Ratio
催化粉 120 g:二氧化矽拋光液 20 L:去離子水 60 L
Catalyst Granule 120 g : Colloidal Silica Slurry 20 L : Deionized Water 60 L
催化粉 6 g:二氧化矽拋光液 1 L:去離子水 3 L
Catalyst Granule 6 g : Colloidal Silica Slurry 1 L : Deionized Water 3 L
調配總量
Total Volume
80 L 拋光液
80 L polishing slurry
4 L 拋光液
4 L polishing slurry
調配步驟
Mixing Steps

IN-Q10 調配步驟 Mixing Steps

備註 Note:使用前請先詳閱 SDS(安全資料表),並遵守安全操作規範。
Please read the SDS(Safety Data Sheet)before use and follow all safety handling instructions.

產品包裝
Package

大包裝:IN-Q10(A) 催化粉 120 g/IN-Q10(B) 二氧化矽拋光液 20 L。
Large Package: IN-Q10(A) Catalyst Granule 120 g / IN-Q10(B) Colloidal Silica Slurry 20 L.

小包裝:IN-Q10(A) 催化粉 6 g/IN-Q10(B) 二氧化矽拋光液 1 L。
Small Package: IN-Q10(A) Catalyst Granule 6 g / IN-Q10(B) Colloidal Silica Slurry 1 L.